GE214, 124, PQ811E (cuarzo electrofundido) o solicitado por los clientes
Limpieza:
Limpieza química clase 100
Cantidad mínima de pedido:
10ea o negociable
Descripción de producto
Quartz wafer tray (RTP quartz tray) is a high-purity fused quartz wafer carrier for "RTP (Rapid Thermal Processing)" single-wafer tools (RTA/RTO/RTN). It holds one wafer inside the lamp-heated chamber during rapid thermal cycles, and is the core fixture between the wafer and process environment. Most RTP quartz trays use "3–4 small quartz support pins" to contact the wafer only at tiny edge points, not full-surface contact. Some versions add a silicon guard ring around the