Quartzpaddle Edge-ondersteuning (eindeffector) voor RTP
Specificatie:
320×237×6T
Materiaal:
GE214/124, PQ811E (elektrisch gesmolten kwarts) of op verzoek van klanten
Schoonmaak:
Klasse 100 chemische reiniging
MOQ:
10e of bespreekbaar
Markeren:
High-purity quartz paddle edge support
,
Wafer transfer RTP chamber support
,
Ultra-precision RTP quartz paddle
Productomschrijving
A quartz paddle end effector is the precision handling tool—essentially the "hand" at the end of a robotic arm—used to physically transfer silicon wafers into and out of a Rapid Thermal Processing (RTP) chamber. Because RTP systems use high-intensity halogen lamps to heat wafers to extreme temperatures (often exceeding 1,000°C in just seconds), the mechanical components touching the wafer must survive brutal thermal environments without causing contamination or temperature