Supporto Quartzpaddle Edge (effettore finale) per RTP
Specifica:
320×237×6T
Materiale:
GE214/124, PQ811E (quarzo elettrofuso) o su richiesta del cliente
Pulizia:
Pulizia chimica classe 100
MOQ:
10ea o negoziabile
Evidenziare:
High-purity quartz paddle edge support
,
Wafer transfer RTP chamber support
,
Ultra-precision RTP quartz paddle
Descrizione di prodotto
A quartz paddle end effector is the precision handling tool—essentially the "hand" at the end of a robotic arm—used to physically transfer silicon wafers into and out of a Rapid Thermal Processing (RTP) chamber. Because RTP systems use high-intensity halogen lamps to heat wafers to extreme temperatures (often exceeding 1,000°C in just seconds), the mechanical components touching the wafer must survive brutal thermal environments without causing contamination or temperature