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Plasma Etching Quartz Ring PQ811E Ground Cover Ring for HTD ESC Chamber

Plasma Etching Quartz Ring PQ811E Ground Cover Ring for HTD ESC Chamber

MOQ: 30ea atau bisa dinegosiasikan
Harga: FOB Shanghai
standard packaging: Kantong penyegel plastik bersih + kotak bergelombang biru + karton induk
Delivery period: 30-45 hari
metode pembayaran: T/T,L/C,D/A,D/P
Supply Capacity: 1000ea per bulan
Informasi Rinci
Tempat asal
Nantong, Jiangsu, Tiongkok
Nama merek
JC
Sertifikasi
MSDS, Rohs, REACH, ISO, GS, BV, Intertek
Nomor model
DLL-046
Spesifikasi:
Φ349,45 × Φ331,67 × 10,26mm
Bahan:
Kuarsa leburan PQ811E tingkat semikonduktor
Toleransi:
±0,01mm
Perawatan permukaan:
Tanah dan tersusun
Pembersihan:
Pembersihan kimia kelas 100
Aplikasi:
Ruang etsa plasma HTD ESC
Menyoroti:

Plasma Etching Quartz Ring

,

HTD ESC Ground Cover Ring

,

PQ811E Fused Quartz Ring

Deskripsi Produk
The Plasma Etching Quartz Ring presented here is a precision ground cover ring engineered for HTD electrostatic chuck (ESC) etching chambers. Fabricated from semiconductor-grade PQ811E fused quartz, this ring shields the wafer edge and the surrounding chamber hardware from reactive plasma while maintaining dimensional stability throughout long etch campaigns. Manufactured in an ISO-controlled facility and finished with Class 100 chemical cleaning, the ring delivers the low
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