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GE Material Electric-Fused Quartz Chamber for AG / AST RTP High-Temperature Reaction Chamber (8-inch Wafer)
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Hubungi Kami
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GE Material Electric-Fused Quartz Chamber for AG / AST RTP High-Temperature Reaction Chamber (8-inch Wafer)
| MOQ: | 10ea atau bisa dinegosiasikan |
| Harga: | FOB NANTONG/SHANGHAI |
| standard packaging: | Kantong penyegel plastik bersih + kotak bergelombang biru + karton induk |
| Delivery period: | 45 Hari |
| metode pembayaran: | L/C,D/A,D/P,T/T |
| Supply Capacity: | >1000ea per bulan |
Informasi Rinci
Tempat asal
Tiongkok
Nama merek
JC
Sertifikasi
MSDS, Rohs, REACH, ISO, GS, BV, Intertek
Nomor model
RTP-011
Keterangan:
RUANG KUARSA AG RTP 8 INCI WF
Spesifikasi:
238×286×62T
Bahan:
GE214, 124, PQ811E (kuarsa leburan listrik) atau diminta oleh pelanggan
Pembersihan:
Pembersihan kimia kelas 100
MOQ:
10ea atau bisa dinegosiasikan
Deskripsi Produk
The Quartz Reaction Chamber refers to a quartz process chamber (or liner) used in RTP tools by AG or AST, with "GE" material. It is the inner transparent quartz enclosure where the wafer sits during rapid thermal processing: rapid thermal annealing (RTA), implant activation, silicidation, RTO/RTN oxidation/nitridation and etc. - IR lamp light passes through the quartz to heat the wafer- Gas distribution, controlled atmosphere / low vacuum process inside- Built-in pyrometer
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