GE214, 124, PQ811E (quarzo fuso elettricamente) o su richiesta del cliente
Pulizia:
Pulizia chimica classe 100
MOQ:
10ea o negoziabile
Descrizione di prodotto
The Quartz Reaction Chamber refers to a quartz process chamber (or liner) used in RTP tools by AG or AST, with "GE" material. It is the inner transparent quartz enclosure where the wafer sits during rapid thermal processing: rapid thermal annealing (RTA), implant activation, silicidation, RTO/RTN oxidation/nitridation and etc. - IR lamp light passes through the quartz to heat the wafer- Gas distribution, controlled atmosphere / low vacuum process inside- Built-in pyrometer