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GE Material Electric-Fused Quartz Chamber for AG / AST RTP High-Temperature Reaction Chamber (8-inch Wafer)
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GE Material Electric-Fused Quartz Chamber for AG / AST RTP High-Temperature Reaction Chamber (8-inch Wafer)
| MOQ: | 10e of bespreekbaar |
| Prijs: | FOB NANTONG/SHANGHAI |
| Standard Packaging: | Schone plastic sluitzak + blauwe golfkartonnen doos + omdoos |
| Delivery Period: | 45 dagen |
| Betalingswijze: | L/C, D/A, D/P, T/T |
| Supply Capacity: | >1000ea per maand |
Detailinformatie
Plaats van herkomst
China
Merknaam
JC
Certificering
MSDS, Rohs, REACH, ISO, GS, BV, Intertek
Modelnummer
RTP-011
Beschrijving:
QUARTZ CHAMBER AG RTP 8-INCH WF
Specificatie:
238×286×62T
Materiaal:
GE214, 124, PQ811E (elektrisch gesmolten kwarts) of op verzoek van klanten
Schoonmaak:
Klasse 100 chemische reiniging
MOQ:
10e of bespreekbaar
Productomschrijving
The Quartz Reaction Chamber refers to a quartz process chamber (or liner) used in RTP tools by AG or AST, with "GE" material. It is the inner transparent quartz enclosure where the wafer sits during rapid thermal processing: rapid thermal annealing (RTA), implant activation, silicidation, RTO/RTN oxidation/nitridation and etc. - IR lamp light passes through the quartz to heat the wafer- Gas distribution, controlled atmosphere / low vacuum process inside- Built-in pyrometer
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